Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982166 | Metal oxide-polymer composite particles for chemical mechanical planarization | Brian G. Prevo, Mark J. Hampden-Smith, Dmitry Fomitchev | 2018-05-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982166 | Metal oxide-polymer composite particles for chemical mechanical planarization | Brian G. Prevo, Mark J. Hampden-Smith, Dmitry Fomitchev | 2018-05-29 |