Issued Patents 2018
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096461 | Semiconductor cleaner systems and methods | — | 2018-10-09 |
| 10090179 | Semiconductor stocker systems and methods | — | 2018-10-02 |
| 10065222 | Cleaning systems and methods for semiconductor substrate storage articles | — | 2018-09-04 |
| 10043651 | Semiconductor cleaner systems and methods | — | 2018-08-07 |
| 10026604 | Semiconductor cleaner systems and methods | — | 2018-07-17 |
| 9947565 | Workpiece stocker with circular configuration | — | 2018-04-17 |
| 9919871 | Buffer station for stocker system | — | 2018-03-20 |
| 9889558 | Redundantable robot assembly for workpiece transfer | — | 2018-02-13 |
| 9868140 | Recirculation substrate container purging systems | — | 2018-01-16 |