Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163670 | Device and method for heat treating an object | Martin Fürfanger, Jörg Palm | 2018-12-25 |
| 9926626 | System and method for processing substrates | Martin Fürfanger, Jörg Palm | 2018-03-27 |
| 9899561 | Method for producing a compound semiconductor, and thin-film solar cell | Robert Lechner, Thomas DALIBOR, Patrick Eraerds | 2018-02-20 |
| 9871155 | Layer system for thin-film solar cells having an NaxIn1SyClz buffer layer | Thomas HAPP, Jörg Palm, Stephan Pohlner, Thomas DALIBOR, Roland Dietmüller | 2018-01-16 |