Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989974 | Method and apparatus of mass flow controlling for use in integrated gas delivery system | Changhua Mou, Maolin Wang, Qianyi SU, Di Zhao | 2018-06-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989974 | Method and apparatus of mass flow controlling for use in integrated gas delivery system | Changhua Mou, Maolin Wang, Qianyi SU, Di Zhao | 2018-06-05 |