Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10037877 | Ion implantation system having beam angle control in drift and deceleration modes | Bo H. Vanderberg | 2018-07-31 | $7,525,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10037877 | Ion implantation system having beam angle control in drift and deceleration modes | Bo H. Vanderberg | 2018-07-31 | $7,525,000 |