Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Peter Moll, Carsten Hartig, Matthias Ruhm, Stefan Thierbach, Stefan Rongen +3 more | 2018-10-30 |
| 9874584 | Monitoring arrangement and method for monitoring an electrical line | Joachim Nurnus, Fritz Volkert | 2018-01-23 |