Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134634 | Metal-assisted chemical etching of a semiconductive substrate with high aspect ratio, high geometic uniformity, and controlled 3D profiles | Liyi Li, Jack K. Moon, Xueying Zhao | 2018-11-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134634 | Metal-assisted chemical etching of a semiconductive substrate with high aspect ratio, high geometic uniformity, and controlled 3D profiles | Liyi Li, Jack K. Moon, Xueying Zhao | 2018-11-20 |