Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079206 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Marco Jan-Jaco Wieland | 2018-09-18 |
| 9934943 | Beam grid layout | Erwin Slot | 2018-04-03 |