Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958790 | Inspection methods, substrates having metrology targets, lithographic system and device manufacturing method | Marc Jurian Kea | 2018-05-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9958790 | Inspection methods, substrates having metrology targets, lithographic system and device manufacturing method | Marc Jurian Kea | 2018-05-01 |