Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10067426 | Metrology apparatus for measuring a structure formed on a substrate by a lithographic process, lithographic system, and method of measuring a structure formed on a substrate by a lithographic process | — | 2018-09-04 |
| 9982991 | Method for controlling a distance between two objects, inspection apparatus and method | — | 2018-05-29 |
| 9909983 | Method and apparatus for improving measurement accuracy | — | 2018-03-06 |