Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9981293 | Method and system for the removal and/or avoidance of contamination in charged particle beam systems | Marc Smits, Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Ludovic Lattard | 2018-05-29 |