Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146133 | Lithographic apparatus and method | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Marc Wilhelmus Maria Van Der Wijst, Mathijs Leonardus Johan Verhees | 2018-12-04 |
| 10146134 | Illumination system | Hubertus Petrus Leonardus Henrica VAN BUSSEL, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT | 2018-12-04 |
| 10125434 | Optical quality diamond material | Geoffrey Alan Scarsbrook, Daniel James Twitchen, Evert Pieter Houwman, WILHEMUS GERTRUDA MARIA NELISSEN, Andrew John Whitehead +2 more | 2018-11-13 |
| 10082424 | Diamond-based monitoring apparatus for lithographic apparatus, and a lithographic apparatus comprising diamond-based monitoring apparatus | — | 2018-09-25 |
| 9933709 | Lithographic apparatus and method | Hubertus Petrus Leonardus Henrica VAN BUSSEL, Arij Jonathan Rijke, Wilhelmus Patrick Elisabeth Maria OP 'T ROOT | 2018-04-03 |