Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9933250 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef | 2018-04-03 |
| 9921489 | Focus monitoring arrangement and inspection apparatus including such an arrangement | Amandev Singh | 2018-03-20 |