Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10042260 | Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method | Chuangxin Zhao | 2018-08-07 |
| 9983485 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | — | 2018-05-29 |