Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10149375 | Target trajectory metrology in an extreme ultraviolet light source | Michael Leslie Price, Mark Joseph Mitry | 2018-12-04 |
| 9904068 | Reducing an optical power of a reflected light beam | Philip M. Conklin | 2018-02-27 |