Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120290 | Fluid handling structure, immersion lithographic apparatus, and device manufacturing method | Daan Daniel Johannes Antonius Van Sommeren, Arend Koolma | 2018-11-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120290 | Fluid handling structure, immersion lithographic apparatus, and device manufacturing method | Daan Daniel Johannes Antonius Van Sommeren, Arend Koolma | 2018-11-06 |