Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107761 | Method and device for focusing in an inspection system | Stanislav Smirnov, Chien-Hung Tseng, Armand Eugene Albert Koolen | 2018-10-23 |
| 10048591 | Catadioptric illumination system for metrology | Stanislav Smirnov | 2018-08-14 |
| 9904173 | Method and apparatuses for optical pupil symmetrization | Stanislav Smirnov | 2018-02-27 |