Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10010987 | Method of mounting substrate support in chamber, method of dismounting substrate support and auxiliary transport tool | Miho Majima | 2018-07-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10010987 | Method of mounting substrate support in chamber, method of dismounting substrate support and auxiliary transport tool | Miho Majima | 2018-07-03 |