Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10053774 | Reactor system for sublimation of pre-clean byproducts and method thereof | Eric Hill | 2018-08-21 |
| 9905420 | Methods of forming silicon germanium tin films and structures and devices including the films | Joe Margetis | 2018-02-27 |
| 9890456 | Method and system for in situ formation of gas-phase compounds | Eric Hill, Jereld Lee Winkler | 2018-02-13 |
| 9892913 | Radial and thickness control via biased multi-port injection settings | Joe Margetis, Gregory Bartlett, Nupur Bhargava | 2018-02-13 |