Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885123 | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2018-02-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885123 | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2018-02-06 |