Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047440 | Methods and apparatus for uniformly and high-rate depositing low resistivity microcrystalline silicon films for display devices | Shuran Sheng | 2018-08-14 |
| 10043641 | Methods and apparatus for processing chamber cleaning end point detection | Young Jin Choi, Beomsoo Park, Fei Peng, Soo Young Choi | 2018-08-07 |