Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10159169 | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods | Michael Kuchar, Dean C. Hruzek, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt +1 more | 2018-12-18 |