Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865438 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2018-01-09 |