Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10043693 | Method and apparatus for handling substrates in a processing system having a buffer chamber | Jaeyoung Kim, Atsushi Kitani, Young Taek Kwon | 2018-08-07 | $22,921,000 |