Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103027 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Wei Liu, Shashank Sharma | 2018-10-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103027 | Hydrogenation and nitridization processes for modifying effective oxide thickness of a film | Johanes S. Swenberg, Wei Liu, Shashank Sharma | 2018-10-16 |