Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134600 | Dielectric contact etch | Leonid Romm, Alan J. Jensen, Xin Zhang | 2018-11-20 |
| 10079154 | Atomic layer etching of silicon nitride | Daniel Le | 2018-09-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134600 | Dielectric contact etch | Leonid Romm, Alan J. Jensen, Xin Zhang | 2018-11-20 |
| 10079154 | Atomic layer etching of silicon nitride | Daniel Le | 2018-09-18 |