Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10081535 | Apparatus and method for shielding and biasing in MEMS devices encapsulated by active circuitry | Li Chen, Kuang L. Yang, Jeffrey A. Gregory | 2018-09-25 |
| 9917243 | Method of fabricating piezoelectric MEMS devices | Eugene Oh Hwang, Sunil Bhave | 2018-03-13 |