Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10079164 | System, apparatus, and method for processing substrates using acoustic energy | Carlos M. Ruiz, Michael Ioannou, Hongseong Son | 2018-09-18 |
| 9987666 | Composite transducer apparatus and system for processing a substrate and method of constructing the same | Richard A. Novak | 2018-06-05 |