Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083813 | Multicolumn charged particle beam exposure apparatus | Takamasa Sato, Shinichi Kojima, Akio Yamada | 2018-09-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083813 | Multicolumn charged particle beam exposure apparatus | Takamasa Sato, Shinichi Kojima, Akio Yamada | 2018-09-25 |