Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977337 | Exposure apparatus and exposure method | Shoji Kojima, Akio Yamada | 2018-05-22 |
| 9859099 | Exposure apparatus and exposure method | Akio Yamada, Hideki Nasuno | 2018-01-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977337 | Exposure apparatus and exposure method | Shoji Kojima, Akio Yamada | 2018-05-22 |
| 9859099 | Exposure apparatus and exposure method | Akio Yamada, Hideki Nasuno | 2018-01-02 |