Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10043658 | Precursors for silicon dioxide gap fill | William Hunks, Chongying Xu, Jeffrey F. Roeder, Steven M. Bilodeau, Weimin Li | 2018-08-07 |
| 10002772 | Vapor phase etching of hafnia and zirconia | — | 2018-06-19 |