Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9809711 | Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process | Ronald Martin Pearlstein, Richard Ho, Xinjian Lei, Steven Gerard Mayorga, Daniel P. Spence | 2017-11-07 |
| 9796739 | AZA-polysilane precursors and methods for depositing films comprising same | Xinjian Lei, Daniel P. Spence | 2017-10-24 |
| 9758534 | Organoaminosilanes and methods for making same | Matthew R. MacDonald, Richard Ho, Xinjian Lei | 2017-09-12 |
| 9677178 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Richard Ho | 2017-06-13 |
| 9640386 | Precursors for CVD silicon carbo-nitride films | Arthur Kenneth Hochberg | 2017-05-02 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Haripin Chandra, Anupama Mallikarjunan +1 more | 2017-04-18 |
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2017-04-04 |