Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546423 | Cleaning of deposition device by injecting cleaning gas into deposition device | Sang In Lee, Samuel S. Pak, Daniel H. Lee | 2017-01-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546423 | Cleaning of deposition device by injecting cleaning gas into deposition device | Sang In Lee, Samuel S. Pak, Daniel H. Lee | 2017-01-17 |