Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558963 | Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation | Sang In Lee, Ilsong Lee | 2017-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558963 | Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation | Sang In Lee, Ilsong Lee | 2017-01-31 |