Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9807864 | Electrode, accelerator column and ion implantation apparatus including same | Sheri A. Durgin, Daniel McGillicuddy, Victor J. Theriault, Klaus Becker | 2017-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9807864 | Electrode, accelerator column and ion implantation apparatus including same | Sheri A. Durgin, Daniel McGillicuddy, Victor J. Theriault, Klaus Becker | 2017-10-31 |