Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9557711 | Method of static scaling of image in holographic lithography | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik +1 more | 2017-01-31 |