Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644287 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Haizheng Song | 2017-05-09 |
| 9644288 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Haizheng Song | 2017-05-09 |