Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793178 | Focused beam scatterometry apparatus and method | Miguel A. Alonso, Stephen Head, Michael Theisen | 2017-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793178 | Focused beam scatterometry apparatus and method | Miguel A. Alonso, Stephen Head, Michael Theisen | 2017-10-17 |