Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9540284 | Tungsten nitrido precursors for the CVD of tungsten nitride, carbonitride, and oxide films | Lisa McElwee-White, Timothy J. Anderson, Christopher O'Donohue | 2017-01-10 |