Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9840786 | Film deposition device of metal film and film deposition method | Yuki Sato, Hiroshi Yanagimoto | 2017-12-12 |
| 9797055 | Metal coating film formation device and method | Yuki Sato, Hiroshi Yanagimoto | 2017-10-24 |
| 9752246 | Film formation apparatus and film formation method forming metal film | Hiroshi Yanagimoto, Yuki Sato | 2017-09-05 |
| 9752249 | Film forming apparatus and film forming method | Hiroshi Yanagimoto, Yuki Sato | 2017-09-05 |
| 9708723 | Electroplating cell, and metal coating and method of forming the same | Fusayoshi Miura, Atsushi Murase, Naoki Hasegawa, Yuki Sato | 2017-07-18 |
| 9677185 | Film formation apparatus and film formation method for forming metal film | Yuki Sato, Hiroshi Yanagimoto | 2017-06-13 |
| 9659892 | Semiconductor device and method of manufacturing semiconductor device | Takuya Kadoguchi, Hiroshi Yanagimoto | 2017-05-23 |