Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9698034 | Substrate storage container and substrate storage container mounting table | Yuuichi Kuroda, Tsunekazu Yasutake, Rempei Nakata | 2017-07-04 |
| 9691648 | Particle supply device and particle supply method | Yuichi Kuroda | 2017-06-27 |