Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818627 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2017-11-14 |
| 9748091 | Substrate treatment apparatus and substrate treatment method | Tatsuhiko Koide, Yoshihiro Ogawa | 2017-08-29 |
| 9583331 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshihiro Ogawa | 2017-02-28 |