Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796953 | Cleaning liquid for lithography and method for cleaning substrate | Tomoya Kumagai, Mai Sugawara | 2017-10-24 |
| 9535330 | Stripping solution for photolithography and pattern formation method | Yuriko Shirai, Takuya Ohhashi | 2017-01-03 |