TK

Takamichi Kikuchi

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #225,691 of 506,227Top 45%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9659756 Plasma etching apparatus and plasma cleaning method — 2017-05-23