SK

Song yun Kang

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #238,596 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9611545 ZnO film production system and production method using ZnO film production system having heating units and control device Yoshinao Kumagai, Akinori Koukitu 2017-04-04