Shunichi Mikami

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%

📍 Rifu, JP: #103 of 276 inventorsTop 40%

Overall (2017): #243,785 of 506,227Top 50%

Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
9653321	Plasma processing method	—	2017-05-16