SH

Shinichi Hatakeyama

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
Overall (2017): #245,690 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9791778 Liquid processing method, liquid processing apparatus and recording medium Takafumi Hasimoto, Naoki Shibata 2017-10-17