SS

Shingo Shimogama

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
📍 Rifu, JP: #103 of 276 inventorsTop 40%
Overall (2017): #242,350 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9558919 Method of modifying electrostatic chuck and plasma processing apparatus Takamitsu KONDO 2017-01-31