SM

Shin Matsuura

TL Tokyo Electron Limited: 1 patents #266 of 744Top 40%
📍 Rifu, JP: #103 of 276 inventorsTop 40%
Overall (2017): #243,858 of 506,227Top 50%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9773647 Plasma processing apparatus and upper electrode assembly Jun Young Chung, Keita KAMBARA 2017-09-26