Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9746849 | Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing | Sukesh Janubhai Patel, Wolfgang Polak, Aaron Archer Waterman, Orion Wolfe | 2017-08-29 |